Fluidized Bed FBCVD Furnace is a UL/CSA ready to pass and a Fluidized Bed Vertical tube Furnace with 1'' O.D Quartz Tube (2'' O.D enlarged central area) for powder CVD ( FBCVD) applications. It consists of a vertical positioned cylindrical heating chamber that surrounds the quartz tube with a built-in filter right in the lower middle section of the central heating zone. Its filter is a porous (15~40 microns) quartz frit that allows the controlled gas flow passes through and floats the particles on a cushion of the gas stream where the interaction between the solid and gaseous materials takes place.

SPECIFICATIONS of Fluidized Bed FBCVD Furnace

Fluidized Zone

-          Provides uniform distribution of the gas blast over the entire cross-section of the tube chamber

-          Solid particles are suspended by an upward gas flowing

-          Excellent heat transfer and coating to every single suspended particle

-          Processed materials can be discharged from the top side of the tube after the cap is been taken off

Note: The gas is passed upward through the fluidized bed at a high enough velocity to lift the particles. However, particles may be swept away from the tube chamber entirely if the velocity was set too high. Depends on the particle size, you may want to adjust the gas in pressure and flow rate until particles are lifted and move turbulently inside of the tube.

Quartz Frit

-          Frits with forced convection design can trap the particles within the central heating area

-          Frit: 15~40 microns porous, 22mm O.D x 4mm thick

Optional Tube     

-          You may consider SS310 high-temperature stainless steel tube for processing high-pressure materials.

-          Max. working temperature 800ºC

-          Max. Pressure 3 bars (built-in over-pressure valve which can be automatically reset and reuseable)

Furnace Casing   

-          Double-layer steel structure with air cooling

-          Split door design for easy installation of tube

-          High purity Al2O3 fibrous insulation designed for maximum energy saving

Key Technical of Fluidized Bed FBCVD Furnace

-          Power: 1200W

-          Voltage: AC 110V or 220V Single Phase, 50/60 Hz

-          Max. Temperature 1100oC

-          Continuous Temperature1000oC

-          Max. Heating Rate<= 20 oC /min

-          Temperature accuracy: +/- 1 ºC.

-          Heating Elements: Fe-Cr-Al Alloy doped by Mo

-          Heating Zone Length: 200mm (single zone)

-          Constant Heating Zone: 100mm (+/-2oC)

Tube Size and Materials of vertical tube furnace

-          One quartz tube is included. Main tube with bottom frit and enlarged space for particles processing

-          Two Ends: 25 ODx 20 ID (mm); Central: 50O.D. x 44 I.D. (mm),

-          Central enlarged area ensures the high aerodynamic performance

Sealing Flanges

-          Bottom flange: Regular designed 1'' bottom flange with 1/4'' tube fitting for introducing primary gas

-          Top Flange: Special designed 1'' top flange with backstreaming secondary (precursor) gas inlet and exhaust, please click the picture to the left for details

Options of vertical tube furnace

-          Optional gas mixing system is available for CVD process.

-          Oxygen Monitoring: An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more

-          Ultrasonic Atomizer can be integrated into the system for delivering sub-micron droplets to the hot zone

Temperature Controller

-          30 programmable segments for precise control of heating rate, cooling rate, and dwell time.

-          Built-in PID Auto-Tune function with overheating & broken thermocouple protection.

-          Over-temperature protection and alarm allow for operation without attendant(s).

Fitting Ports

-          1/4'' Tube Fittings were installed on both sides of the flange for standard connection to the gas supplier

Warranty

One year limited warranty (Consumable parts such as heating elements, processing tubes, and o-rings are not covered by the warranty, please order the replacement at related products below.)

Warning of Fluidized Bed CVD Furnace

-          Tube furnaces with quartz tube is designed for using under low positive pressure < 0.2 bars / 3 psi / 0.02 Mpa

-          Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.

-          Vacuum limit definition for all quartz tube furnaces: Vacuum pressures may only be safely used up to 1000°C