HTTF-1200- RR Roll to Roll CVD tube Furnace is a lab-scale Roll to Roll graphene preparation tube furnace system, which three heating zone split tube furnaces and two vacuum chambers with substrate reeling in and out. The Three Heating Zone Tube Furnace R2R system is designed for exploring the flexibility to grow graphene or other CVD films continuously for the industry.
HTTF-1200- RR Roll to Roll CVD tube Furnace is a lab-scale Roll to Roll graphene preparation tube furnace system, which contains 100mm O.D. three heating zone split tube furnaces at 1200ºC Max. and two vacuum chambers with substrate reeling in and out, as well as a touch screen control panel. The Three Heating Zone Tube Furnace R2R system is designed for exploring the flexibility to grow graphene or other CVD films continuously for the industry.
CVD Chemical Vapor Deposition furnace is a process which allows the creation of a deposit on the surface of mechanical parts, to protect them from oxidation and corrosion.
Three Heating Zone Tube Furnace | Input power: 220VAC, 50/60Hz, a single phase at Max. 5KW Heating element: Fe-Cr-Al Alloy doped by Mo 1200 C Max. working temperature for < 60 minutes 1100 C Max. working temperature for continuous heating Recommended heating rate: ≤ 10ºC/min High-purity quartz tube: φ100 x 1400mm Total three heating zone lengths: 600mm (150mm + 300mm + 150mm) Built-in PID Auto-Tune function with overheating & broken thermocouple protection Temperature accuracy: ±1ºC |
R2R Vacuum Chambers | Two vacuum chambers are located at two ends of the furnace and connected to the quartz tube The reeling rollers for a substrate in and out are located inside the vacuum chamber The reeling speed for the substrate is adjustable from 1- 400mm/min The precision tension control mechanism is built in form 0 - 1000g One roll of copper foil with 80 mm width and 0.025 mm thick (~2 kg) is included for customer practice The max vacuum pressure for the chamber: 5 x 10^-2 torr |
Three-Channel Gas Delivery Station (Optional) | Power: 220VAC, 50Hz, single-phase at Max. 23KW Gas mixing tank: φ80 x 120mm Working Temperature: 5~45ºC Max. Pressure: 3 x 106 Pa Accuracy: ±1.5% F.S. Liner: ±(0.5-1.5)% F.S. Duplicate accuracy: ±0.2%F.S. Controlling Range: Controller 1: 0~50 SCCM (Methane calibration) Controller 2: 1~200 SCCM (H2 gas calibration) Controller 3: 1~200 SCCM (Ar gas calibration) Click Pic on the left for detailed specification Warning: H2 and Methane must be installed nearby the furnace to alarm gas leaking |
Vacuum Pump and Valve | Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 Torr. KFD25 adapter and stainless steel pipe are connected between the pump and tube flange with the ball valve Digital vacuum pressure gauge and display are installed with the furnace The oil-less pump and gas mixing & delivery system are available and the PID pressure-controlled vacuum system is available upon request at an extra cost |
Anti-corrosive Pressure Gauge | 3.8 x 10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent High accuracy and reproducibility in the atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens the process cycle Easy to exchange plug & play sensor element Click the picture to view detailed specs |
Temperature Controller | Three temperature controllers with 30 programmable segments with +/- 1ºC temperature accuracy Built-in PID Auto-Tune function with overheating & broken thermocouple protection Over-temperature protection and alarm allow for operation without attendant(s) RS485 Communications Port with PC operation software You may upgrade the temperature controller to the Eurotherm Controller with 0.1ºC accuracy with software |
Control Panel | 7" touch screen control panel which will control temperature, gas flow rate, plasma power PC control software is available upon request for remote operation by Laptop computer (Must buy a laptop with pre-installed software) |
Dimensions | 2400mm L x 600mm W x 1400mm H |
Warranty | One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) |
Application Note | The quartz tube is designed for use under vacuum and low pressure < 0.2 bars / 3 psi ( Relative ). The furnace can be modified into a roll to roll hydrogen wire annealing furnace via adding H2 burning and leaking detecting and protection system, as below |
HTTF-1200- RR Roll to Roll CVD tube Furnace is a lab-scale Roll to Roll graphene preparation tube furnace system, which contains 100mm O.D. three heating zone split tube furnaces at 1200ºC Max. and two vacuum chambers with substrate reeling in and out, as well as a touch screen control panel. The Three Heating Zone Tube Furnace R2R system is designed for exploring the flexibility to grow graphene or other CVD films continuously for the industry.
CVD Chemical Vapor Deposition furnace is a process which allows the creation of a deposit on the surface of mechanical parts, to protect them from oxidation and corrosion.
Three Heating Zone Tube Furnace | Input power: 220VAC, 50/60Hz, a single phase at Max. 5KW Heating element: Fe-Cr-Al Alloy doped by Mo 1200 C Max. working temperature for < 60 minutes 1100 C Max. working temperature for continuous heating Recommended heating rate: ≤ 10ºC/min High-purity quartz tube: φ100 x 1400mm Total three heating zone lengths: 600mm (150mm + 300mm + 150mm) Built-in PID Auto-Tune function with overheating & broken thermocouple protection Temperature accuracy: ±1ºC |
R2R Vacuum Chambers | Two vacuum chambers are located at two ends of the furnace and connected to the quartz tube The reeling rollers for a substrate in and out are located inside the vacuum chamber The reeling speed for the substrate is adjustable from 1- 400mm/min The precision tension control mechanism is built in form 0 - 1000g One roll of copper foil with 80 mm width and 0.025 mm thick (~2 kg) is included for customer practice The max vacuum pressure for the chamber: 5 x 10^-2 torr |
Three-Channel Gas Delivery Station (Optional) | Power: 220VAC, 50Hz, single-phase at Max. 23KW Gas mixing tank: φ80 x 120mm Working Temperature: 5~45ºC Max. Pressure: 3 x 106 Pa Accuracy: ±1.5% F.S. Liner: ±(0.5-1.5)% F.S. Duplicate accuracy: ±0.2%F.S. Controlling Range: Controller 1: 0~50 SCCM (Methane calibration) Controller 2: 1~200 SCCM (H2 gas calibration) Controller 3: 1~200 SCCM (Ar gas calibration) Click Pic on the left for detailed specification Warning: H2 and Methane must be installed nearby the furnace to alarm gas leaking |
Vacuum Pump and Valve | Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 Torr. KFD25 adapter and stainless steel pipe are connected between the pump and tube flange with the ball valve Digital vacuum pressure gauge and display are installed with the furnace The oil-less pump and gas mixing & delivery system are available and the PID pressure-controlled vacuum system is available upon request at an extra cost |
Anti-corrosive Pressure Gauge | 3.8 x 10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent High accuracy and reproducibility in the atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens the process cycle Easy to exchange plug & play sensor element Click the picture to view detailed specs |
Temperature Controller | Three temperature controllers with 30 programmable segments with +/- 1ºC temperature accuracy Built-in PID Auto-Tune function with overheating & broken thermocouple protection Over-temperature protection and alarm allow for operation without attendant(s) RS485 Communications Port with PC operation software You may upgrade the temperature controller to the Eurotherm Controller with 0.1ºC accuracy with software |
Control Panel | 7" touch screen control panel which will control temperature, gas flow rate, plasma power PC control software is available upon request for remote operation by Laptop computer (Must buy a laptop with pre-installed software) |
Dimensions | 2400mm L x 600mm W x 1400mm H |
Warranty | One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) |
Application Note | The quartz tube is designed for use under vacuum and low pressure < 0.2 bars / 3 psi ( Relative ). The furnace can be modified into a roll to roll hydrogen wire annealing furnace via adding H2 burning and leaking detecting and protection system, as below |
