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Precision Vacuum Pressure Regulating System with Motorized Valve EQ-VPC-MV-LD
  • Precision Vacuum Pressure Regulating System with Motorized Valve EQ-VPC-MV-LD
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Precision Vacuum Pressure Regulating System with Motorized Valve EQ-VPC-MV-LD

This is a turn-key solution for precisely controlling the vacuum pressure in a vacuum chamber/system. Benefits from the motorized valve and wide range vacuum measuring gauge, the input gas flow can be precisely regulated in order to maintain certain vacuum pressure range from 1.0E-6 to 760 Torr, guaranteed.

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  • Product Details
  • This is a turn-key solution for precisely controlling the vacuum pressure in a vacuum chamber/system. Benefits from the motorized valve and wide range vacuum measuring gauge, the input gas flow can be precisely regulated in order to maintain certain vacuum pressure range from 1.0E-6 to 760 Torr, guaranteed.

     

    Upgraeded option for High-Vacuum Pumping Station

    High-Vacuum Pumping Station with Pfeiffer Turbo and Rotary Vane Backing Pump (Upto 1E-7 mbar at Faster Pumping Speed) - EQ-PV-HVS2-LD

    Controller

    For creating a control section in conjunction with the pressure regulating valves

    Simple operation with self-explanatory LCD display and function keys

    Analog/digital inputs/outputs and interfaces

    Settable PID regulating algorithm

    For system manufacturers, as a supplement to their own control unit

    Working voltage: 100~250 VAC, 50/60 Hz universal

    Power Consumption: 50 W

    Pressure Gauge

    (Not INCLUDED)

    Flange size: DN 25 ISO-KF, stainless steel

    Measurement range from 3.75E-9 to 760 Torr

    Two gauge heads (Pirani and cold cathode) in a single case (inverted magnetron)

    Corrosion-resistant

    Maximum pressure: 3,000 Torr (refers to inert gasses)

    Operating temperatures: 5-55 °C

    Motorized Valve

    Flange in and out: DN 16 ISO-KF

    Ambient temperature: 5-40 °C (41-104 °F)

    Gas flow controllable range: 3.75E-6 to 937.5 Torr l/s 

    Operating pressure: 7.5E-9 to 1875 Torr

    With integrated motor control electronics

    Fluoroelastomer dosing sleeve

    Application Notes

    The motorized valve is used together with a control unit for controlling the pressure in a vacuum system, with a variable gas flow (upstream control) for maintaining a desired vacuum pressure. More specifically, the control valve regulates the gas inlet of the vacuum system. The valve plate moves in closing direction when the pressure in the vacuum system rises, vice and verse.

    This turn-key solution can be used with most of the vacuum pumps available on the market,  such as turbo, oilless/dry, oil, diffusion pumps.

    It must not be used with liquid vapors.

     


    This is a turn-key solution for precisely controlling the vacuum pressure in a vacuum chamber/system. Benefits from the motorized valve and wide range vacuum measuring gauge, the input gas flow can be precisely regulated in order to maintain certain vacuum pressure range from 1.0E-6 to 760 Torr, guaranteed.

     

    Upgraeded option for High-Vacuum Pumping Station

    High-Vacuum Pumping Station with Pfeiffer Turbo and Rotary Vane Backing Pump (Upto 1E-7 mbar at Faster Pumping Speed) - EQ-PV-HVS2-LD

    Controller

    For creating a control section in conjunction with the pressure regulating valves

    Simple operation with self-explanatory LCD display and function keys

    Analog/digital inputs/outputs and interfaces

    Settable PID regulating algorithm

    For system manufacturers, as a supplement to their own control unit

    Working voltage: 100~250 VAC, 50/60 Hz universal

    Power Consumption: 50 W

    Pressure Gauge

    (Not INCLUDED)

    Flange size: DN 25 ISO-KF, stainless steel

    Measurement range from 3.75E-9 to 760 Torr

    Two gauge heads (Pirani and cold cathode) in a single case (inverted magnetron)

    Corrosion-resistant

    Maximum pressure: 3,000 Torr (refers to inert gasses)

    Operating temperatures: 5-55 °C

    Motorized Valve

    Flange in and out: DN 16 ISO-KF

    Ambient temperature: 5-40 °C (41-104 °F)

    Gas flow controllable range: 3.75E-6 to 937.5 Torr l/s 

    Operating pressure: 7.5E-9 to 1875 Torr

    With integrated motor control electronics

    Fluoroelastomer dosing sleeve

    Application Notes

    The motorized valve is used together with a control unit for controlling the pressure in a vacuum system, with a variable gas flow (upstream control) for maintaining a desired vacuum pressure. More specifically, the control valve regulates the gas inlet of the vacuum system. The valve plate moves in closing direction when the pressure in the vacuum system rises, vice and verse.

    This turn-key solution can be used with most of the vacuum pumps available on the market,  such as turbo, oilless/dry, oil, diffusion pumps.

    It must not be used with liquid vapors.